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Halocarbon TFE-Methacrylate
2-Propenoic acid, 2-methyl-, 2,2,2-trifluoroethyl ester (TFEMA)
AKA: 2,2,2-Trifluoroethyl methacrylate
CAS # 352-87-4
2,2,2-Trifluoroethyl methacrylate is a useful monomer that can be incorporated into photoresist polymers.